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Hardware
Semiconductor Equipment
Precision motion for the fab floor.
Sub-micron positioning stages, handling automation and metrology fixtures for semiconductor and advanced packaging lines. The same motion control competence as our simulators, applied where the tolerance is measured in nanometres.
Specifications
- Positioning resolution
- Sub-micron
- Stage types
- XY, XYZ-theta, wafer handling
- Environment
- Cleanroom-compatible construction
- Metrology
- Interferometric feedback option
- Host integration
- SECS/GEM
Indicative figures. Final specification is confirmed against the application at quotation.
Features
- Sub-micron closed-loop positioning
- Cleanroom-compatible materials and construction
- SECS/GEM host integration
- Interferometric feedback where tolerance demands it